{"product_id":"047107828x","title":"Glow Discharge Processes: Sputtering and Plasma Etching","description":"\n\u003cp\u003eDevelops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.\u003c\/p\u003e\u003cbr\u003e\u003cp\u003eCategories:\u003c\/p\u003e\u003cul class=\"category-tree\"\u003e\n\u003cli\u003eEngineering \u0026amp; Transportation\u003cul class=\"category-tree\"\u003e\n\u003cli\u003eEngineering\u003cul class=\"category-tree\"\u003e\n\u003cli\u003eElectrical \u0026amp; Electronics\u003cul class=\"category-tree\"\u003e\u003cli class=\"category-tree\"\u003eGeneral\u003c\/li\u003e\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cul class=\"category-tree\"\u003e\u003cli class=\"category-tree\"\u003eTelecommunications \u0026amp; Sensors\u003c\/li\u003e\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003cul class=\"category-tree\"\u003e\n\u003cli\u003eScience \u0026amp; Math\u003cul class=\"category-tree\"\u003e\n\u003cli\u003ePhysics\u003cul class=\"category-tree\"\u003e\u003cli class=\"category-tree\"\u003eElectromagnetism\u003c\/li\u003e\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\u003c\/li\u003e\n\u003c\/ul\u003e\n\n\u003ch2\u003eBook details\u003c\/h2\u003e\u003cul\u003e\n\u003cli\u003e\n\u003cstrong\u003eAuthor:\u003c\/strong\u003e Chapman, Brian N.\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eFormat:\u003c\/strong\u003e hardcover\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eEdition:\u003c\/strong\u003e 1\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePublisher:\u003c\/strong\u003e Wiley-Interscience\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eLanguage:\u003c\/strong\u003e English\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003ePages:\u003c\/strong\u003e 406\u003c\/li\u003e\n\u003cli\u003e\n\u003cstrong\u003eISBN-13:\u003c\/strong\u003e 9780471078289\u003c\/li\u003e\n\u003c\/ul\u003e","brand":"Wiley-Interscience","offers":[{"title":"Used - Acceptable","offer_id":49279070896318,"sku":"047107828X-5","price":51.47,"currency_code":"USD","in_stock":true}],"thumbnail_url":"\/\/cdn.shopify.com\/s\/files\/1\/0640\/9689\/5166\/files\/41fkAvMoqBL.jpg?v=1791942578","url":"https:\/\/shop.sustainablebooks.com\/products\/047107828x","provider":"Sustainable Books","version":"1.0","type":"link"}